MW / Motion Systems

Air Bearing Stages

Contact-free precision motion platforms engineered for ultra-smooth travel, high geometric stability, and demanding metrology, semiconductor, photonics, and research applications.

GR-UP Series | Ultra-Precision Air-Bearing Type
Air Bearing Stage

GR-UP Series | Ultra-Precision Air-Bearing Type

The mPT-GR-UP series air-bearing rotary stages adopt high-precision and high-rigidity air bearings as the rotational support, achieving a total mot...

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GR-P Series | Air-Bearing Precision Type
Air Bearing Stage

GR-P Series | Air-Bearing Precision Type

Air-bearing axis system Positioning accuracy: 1 arc-sec Repeatability: 0.5 arc-sec Axial / radial motion error: 100 nm / 75 nm Available ...

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MW Air Bearing Stage for Lithography Advanced Packaging and Metrology
Air Bearing Stage

MW Air Bearing Stage for Lithography Advanced Packaging and Metrology

Frictionless Motion for the Most Demanding ApplicationsThe MW Air Bearing Stage is engineered to meet the highest precision standards required in s...

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MW-0745 ZC-Axis High Precision Vertical Air Bearing Stage
Air Bearing Stage

MW-0745 ZC-Axis High Precision Vertical Air Bearing Stage

The MW-0745 ZC-Axis is a high-precision vertical stage that leverages advanced air bearing technology to deliver exceptional straightness, stiffnes...

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MW-0730 High Precision Impulse Decoupled Stage Air Bearing Stage
Air Bearing Stage

MW-0730 High Precision Impulse Decoupled Stage Air Bearing Stage

The MW-0730 High Precision Impulse Decoupled Stage is purpose-built for ultra-high accuracy applications where dynamic decoupling and vibration iso...

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MW-0117 XY Air Bearing Stage Precision Air Bearing Solution
Air Bearing Stage

MW-0117 XY Air Bearing Stage Precision Air Bearing Solution

The MW-0117 XY Air Bearing Stage is designed to deliver exceptional precision and stability for demanding industrial applications. Featuring granit...

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MW / Ultra-Precision Motion

Motion without mechanical contact.

MW air bearing stages use contact-free guidance to deliver exceptionally smooth motion, low mechanical disturbance, and the stability demanded by ultra-precision positioning systems.

When mechanical contact becomes the limitation

Conventional mechanical guidance can introduce friction, wear, vibration, and geometric variation. Air bearing technology replaces physical contact with a controlled air film, creating a motion platform designed for applications where smoothness and geometric stability are fundamental to measurement and positioning performance.

Contact-free motion

Air bearing guidance minimizes mechanical contact and supports smooth, low-disturbance travel.

Geometric stability

Rigid platform construction and precision guidance support demanding measurement and positioning applications.

Ultra-precision integration

Designed for metrology, semiconductor inspection, photonics, and research systems where motion quality directly matters.

Built for environments where motion quality matters

MW air bearing stages provide a foundation for high-end metrology, optical alignment, wafer inspection, precision scanning, and advanced research equipment.

Looking for a contact-free motion architecture? Work with MW engineers to define the right stage configuration.

Discuss Your Motion Requirements →